1 中国科学院半导体研究所集成光电子学国家重点实验室, 北京 100083
2 河南仕佳光子科技股份有限公司河南省光电芯片与集成重点实验室, 河南 鹤壁 458030
数据中心光互连正朝着高速方向发展。针对数据中心光互连过程,采用折射率差为1.5%的石英基二氧化硅光波导,设计并制备了光电集成的小型化、低损耗、小输出模场的四通道粗波分解复用芯片,该芯片满足高速数据中心200 Gbit·s -1/400 Gbit·s -1的传输速率要求,最小插入损耗小于1.07 dB,1 dB带宽大于13.7 nm,3 dB带宽大于16.1 nm,偏振相关损耗小于0.08 dB,相邻串扰大于24 dB,非相邻串扰大于30 dB。所设计的芯片完全满足高速数据中心光互连的波分复用芯片商用要求。
光学器件 粗波分解复用 数据中心光互连 石英基
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 Division of Quantum Materials and Devices, Beijing Academy of Quantum Information Sciences, Beijing 100193, China
4 Laboratory of Quantum Information, CAS, University of Science and Technology of China, Hefei 230026, China
Quantum key distribution (QKD) provides a solution for communication of unconditional security. However, the quantum channel disturbance in the field severely increases the quantum bit-error rate, degrading the performance of a QKD system. Here we present a setup comprising silica planar light wave circuits (PLCs), which is robust against the channel polarization disturbance. Our PLCs are based on the asymmetric Mach–Zehnder interferometer (AMZI), integrated with a tunable power splitter and thermo-optic phase modulators. The polarization characteristics of the AMZI PLC are investigated by a novel pulse self-interfering method to determine the operation temperature of implementing polarization insensitivity. Over a 20 km fiber channel with 30 Hz polarization scrambling, our time-bin phase-encoding QKD setup is characterized with an interference fringe visibility of 98.72%. The extinction ratio for the phase states is kept between 18 and 21 dB for 6 h without active phase correction.
Photonics Research
2021, 9(2): 02000222
1 北京信息科技大学 光纤传感与系统北京实验室,北京 100016
2 中国科学院半导体研究所 集成光电子学国家重点实验室,北京 100083
3 中国科学院大学 材料与光电研究中心,北京 100049
刻蚀衍射光栅作为波分复用/解复用器件,有望在光通信系统中得到广泛应用。在基于顶层硅厚度为220 nm的绝缘体上硅材料上设计并制作了一种新型刻蚀衍射光栅,该刻蚀衍射光栅引入六角晶格空气孔型光子晶体作为其反射镜。模拟结果显示,相较于传统的阶梯光栅反射镜的刻蚀衍射光栅,光子晶体反射镜的刻蚀衍射光栅在理论上可有效降低器件的制作工艺难度以及插入损耗,同时可以实现器件偏振的保持。随后仅利用一步电子束光刻工艺及一步电感耦合等离子体刻蚀工艺制作了该光子晶体反射镜的刻蚀衍射光栅。测试结果表明:该光子晶体反射镜的刻蚀衍射光栅片上损耗为9.51~11.86 dB,串扰为5.87~8.72 dB,后续可通过优化工艺条件和优化输出波导布局,进一步提高器件的性能。
刻蚀衍射光栅 光子晶体 硅基光子学 波分复用/解复用 etching diffraction grating photonic crystal silicon photonics wavelength division multiplexing/de-multiplexing 红外与激光工程
2019, 48(9): 0916005
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
A high-performance monolithic integrated wavelength division multiplexing silicon (Si) photonics receiver chip is fabricated on a silicon-on-insulator platform. The receiver chip has a 25-channel Si nanowire-arrayed waveguide grating, and each channel is integrated with a high-speed waveguide Ge-on-Si photodetector. The central wavelength, optical insertion loss, and cross talk of the array waveguide grating are 1550.6?nm, 5–8?dB, and ?12–?15??dB, respectively. The photodetectors show low dark current density of 16.9??mA/cm2 at ?1??V and a high responsivity of 0.82?A/W at 1550?nm. High bandwidths of 23 and 29?GHz are achieved at 0 and ?1??V, respectively. Each channel can operate at 50?Gbps with low input optical power even under zero bias, which realizes an aggregate data rate of 1.25?Tbps.
Photonics Research
2019, 7(6): 06000659
1 中国科学院半导体研究所集成光电子学国家重点联合实验室, 北京 100083
2 中国科学院大学材料科学与光电技术学院, 北京 100049
论述了光学相控阵的原理,回顾了光学相控阵的发展历程,特别是近年来硅光子相控阵的研究进展。利用与互补金属氧化物半导体(CMOS)工艺线相兼容的绝缘体上硅(SOI)技术实现了大规模的集成,目前国外报道的最大的硅光子相控阵集成了4096个阵元。在硅光子上实现的二维光束扫描角度可以达到46°×36°,光束宽度只有0.85°×0.18°,天线的损耗小于3 dB,且旁瓣抑制大于10 dB。此外,采用微机电系统(MEMS)器件实现的光学相控阵的光束扫描速度超过0.5 MHz。阐述了各种方式实现光学相控阵的优缺点,并对未来发展前景进行了展望。最后,介绍了光学相控阵在激光雷达、成像、**上的应用。
光学器件 光波导 光学相控阵 扫描角度 绝缘体上硅 激光与光电子学进展
2018, 55(2): 020006
Author Affiliations
Abstract
1 State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 College of Materials Science and Opto-Electronic Technology, University of Chinese Academy of Sciences, Beijing 100049, China
Both the 4×20 GHz coarse wavelength division multiplexing and LAN-WDM receiver optical sub-assemblies (ROSAs) were developed. The ROSA package was hybrid integrated with a planar lightwave circuit arrayed waveguide grating (AWG) with 2% refractive index difference and a four-channel top-illuminated positive-intrinsic-negative photodetector (PD) array. The output waveguides of the AWG were designed in a multimode structure to provide flat-top optical spectra, and their end facet was angle-polished to form a total internal reflection interface to realize vertical coupling with a PD array. The maximum responsivity of ROSA was about 0.4 A/W, and its 3 dB bandwidth of frequency response was up to 20 GHz for each transmission lane. The hybrid integrated ROSA would be a cost-effective and easy-assembling solution for 100 GbE data center interconnections.
060.4230 Multiplexing 230.7370 Waveguides Chinese Optics Letters
2018, 16(6): 060603
1 中国科学院半导体研究所集成光电子学国家重点联合实验室, 北京 100083
2 中国科学院大学材料科学与光电技术学院, 北京 100049
现阶段的光模块封装类型已从小型可插拔(SFP)系列逐渐向100 Gb/s可插拔(CFP)系列和4通道SFP(QSFP)系列过渡, 传输速率最高可达400 Gb/s, 发射端激光器消光比大于9 dB, 光波分复用器插入损耗小于1 dB, 发射功率大于0.3 dBm, 接收端探测器响应度为0.7 A/W, 接收灵敏度小于-17 dBm。阐述了在数据中心光互连中可以应用于IEEE制定的40/100 GbE标准802.3 ba的发射和接收集成芯片, 主要包括分立器件组装芯片、混合集成芯片和单片集成芯片, 介绍了其各种类型的基本结构和特性。
光学器件 硅光子 波分复用 阵列波导光栅 数据中心 激光与光电子学进展
2016, 53(12): 120002
1 中国科学院半导体研究所 集成光电子学国家重点联合实验室, 北京 100083
2 河南仕佳光子科技有限公司, 河南 鹤壁 458030
设计了一种基于绝缘层上硅(SOI)的推挽式硅-有机物混合(SOH)马赫-曾德干涉型(MZI)电光调制器。利用薄膜模式匹配法对槽波导(slot)的光场分布进行了仿真分析, 优化后得到了限制因子为0.32的slot波导结构。采用推挽式马赫-曾德干涉仪结构, 并在相移臂嵌入LX M1非线性有机材料, 得到半波电压-长度积Vπ·L为0.885V·mm、电学响应带宽fRC可达123.2GHz、开关速度为8.11ps的SOH调制器结构。利用基于本征有限元法求解麦克斯韦方程, 对共平面波导电极系统进行了计算仿真, 获得了特性阻抗接近50Ω、高频速率匹配的电极结构。
马赫-曾德干涉仪 电光调制器 slot波导 共平面波导行波电极 SOH SOH Mach-Zahnder interferometer electro-optic modulator slot waveguide coplanar waveguide travel wave electrode